Optical transceiver by FOWLP and DoP multichip integration

ABSTRACT

An optical transceiver by hybrid multichip integration. The optical transceiver includes a PCB with a plurality of prefabricated surface bonding sites. A first chip includes a FOWLP package of multiple electronics devices embedded in a dielectric molding layer overlying a dielectric redistribution layer is disposed on the PCB by respectively bonding a plurality of conductor balls between the dielectric redistribution layer and the plurality of prefabricated surface bonding sites while exposing soldering material filled in multiple through-mold vias (TMVs) in the dielectric molding layer. The optical transceiver further includes a second chip configured as a Sipho die comprising photonics devices embedded in a SOI wafer substantially free from any electronics device process. The second chip is stacked over the first chip with multiple conductor bumps being bonded respectively to the soldering material in the multiple TMVs.

CROSS-REFERENCE TO RELATED APPLICATIONS

N/A

BACKGROUND OF THE INVENTION

The present disclosure is related to an opto-electrical integration,more particularly, to a compact optical transceiver based onDie-on-Package multichip stacking integration utilizing low cost Fan-OutWafer Level Packaging (FOWLP) architecture and through-mold via (TMV)technology.

As science and technology are updated rapidly, processing speed andcapacity of the computer increase correspondingly. The communicationtransmission or reception using the traditional cable is limited tobandwidth and transmission speed of the traditional cable and massinformation transmission required in modern life causes the traditionalcommunication transmission overload. To correspond to such requirement,the optical fiber transmission system replaces the traditionalcommunication transmission system gradually. The optical fibercommunication is chosen for systems requiring higher bandwidth andlonger distance that electrical cable cannot accommodate. Presentelectronic industrial performs research toward optical transmissionwhich will become the mainstream in the future even for short distancecommunication. Said optical communication is a technology in that lightwave functions as signal carrier and transmitted between two nodes viathe optical fiber. An optical communication system includes an opticaltransmitter and an optical receiver. By the optical transceiver, thereceived optical signal can be converted to an electrical signal capableof being processed by an IC, or the processed electrical signal can beconverted to the optical signal to be transmitted via optical fiber.Therefore, objective of communication can be achieved.

With the advances of optical communication technology and applicationsdriven by the market, the demands become stronger on increasingbandwidth for optical communication and decreasing package footprint ofan optical transceiver. It is more and more challenging to integrate allnecessary components within smaller and smaller module package. For thestate-of-art optical transceiver products, all the critical componentsincluding clock data recovery (CDRs), modulator drivers, transimpedanceamplifiers (TIAs), and photonics chips having optical passives,modulators, and photo detectors, are assembled side-by-side on a PCB ina 2D fashion. This approach has at least two drawbacks for developingany future optical transceiver with data rate greater than 400G.Firstly, the side-by-side placement of the components consumes much ofthe board area for optical transceiver as a pluggable product or majorsubstrate area for on-board optics product, making it very difficult tofurther shrink the product size. Secondly, side-by-side placement on thePCB creates longer electrical transmission length and often requireswire bonds between electrical die and photonics die, introducing moreelectrical loss which damages signal integrity for very high data ratetransceiver product, e.g., >56 Gbaud symbol rate. In particular, thewire bonds lead to impedance mismatch due to large inductance, degradingthe signal a lot at higher frequencies. As such, it is not practical touse wirebond as electrical interconnect between chips or between chipsand board for the applications where high frequency (e.g., >40 GHz)analog signal is transmitted. The large inductance of wire bonds hasbecome a bottle neck of high speed signal transmission.

To shorten the interconnect length of conventional wire bonds betweenelectronics devices (e.g., from LD driver/TIA to digital signalprocessor DSP) or between electronics (driver/TIA) and photonics (e.g.,CDR and PAM4 ASIC), people have started to use through-silicon via (TSV)process in Si photonics die to replace wire bonds and makeinterconnections. However, TSV process is still ready for massproduction due to high cost of performing the process and handling thinwafer. Moreover, the current infrastructure and investment only allowfor fine TSV process in 12-inch wafers. This limits the flexibility ofTSV-based interconnects to be employed in various technologies that usesubstrate size less than 12-inch, e.g., 8-inch SiGe process, 8-inchBiCMOS process, GaAs-substrate process, InP-substrate process, and8-inch MEMS process. The complexity of manufacturing process, low yield,inefficient wafer area usage, and very expensive in scaling to advancedelectronics making the TSV process impractical for making Si photonicsfield product. Therefore, there is demand on alternative solutions forintegrating electronics functions and photonics circuits to meet therequirement of ever increasing bandwidth between electronics andphotonics. It is desired to have an improved packaging scheme thatenjoys the high performance benefit of a 3D multichip stackingintegration with much shorter interconnect and lower parasitic whilekeeping the packaging process simple and cost low.

BRIEF SUMMARY OF THE INVENTION

The present disclosure is related to an integrated photonics device.More particularly, a high-speed compact optical transceiver is formed bya die-on-package (DoP) multichip integration of a high-yield siliconphotonics chip stacking over a FOWLP packaged electronics chip withthrough-mold vias (TMVs) for electrical coupling. In certainembodiments, the invention is applied for high speed opticalcommunication, though other applications are possible.

In modern electrical interconnect systems, high-speed serial links havereplaced parallel data buses, and serial link speed is rapidlyincreasing due to the evolution of CMOS technology. Internet bandwidthdoubles almost every two years following Moore's Law. But Moore's Law iscoming to an end in the next decade. Standard CMOS silicon transistorswill stop scaling around 5 nm. And the internet bandwidth increasing dueto process scaling will plateau. But Internet and mobile applicationscontinuously demand a huge amount of bandwidth for transferring photo,video, music, and other multimedia files. This disclosure describestechniques and methods to improve the communication bandwidth beyondMoore's law.

Serial link performance is limited by the channel electrical bandwidthand the electronic components. In order to resolve the inter-symbolinterference (ISI) problems caused by bandwidth limitations, we need tobring all electrical components as close as possible to reduce thedistance or channel length among them. Monolithic integration ofphotonics and electronics (e.g., see U.S. Pat. No. 8,895,413) promises aone-time boost in their capabilities. The patent by Luxtera disclosestwo monolithic ways to integrate Si photonics and high speedelectronics, i.e., side-by-side integration and 3D integration usingthrough-Si-via (TSV) embedded in electronics part. Indeed, these twomethods introduces much lower parasitic between electronics andphotonics than what wire bond method provides. However, the process isvery expensive and production yield is low due to the extreme complexityof the manufacturing process. In system point of view, there is anotherdrawback, i.e., wirebonding is still needed between electronic circuitsand PCB or package substrate. Therefore, there is no improvement inelectrical signal transmission from PCB or package substrate toelectronics circuits or vice versa. An alternative way to achieveadvanced integration with high yield is to use multiple chip integrationtechnology. In this application, we will disclose a high speed compactoptical transceiver using electrical/optical die-stacking integrationvia separately fabricated TSV/TGV interposers as well as a staggeredbump arrangement with optimized pitch size.

In a specific embodiment, the present invention provides an opticaltransceiver by hybrid multichip integration. The optical transceiverincludes a PCB with a plurality of prefabricated surface bonding sites.Additionally, the optical transceiver includes a first chip comprisingmultiple electronics devices embedded in a dielectric molding layeroverlying a dielectric redistribution layer. The first chip is disposedon the PCB by bonding the dielectric redistribution layer via aplurality of conductor balls respectively on the plurality ofprefabricated surface bonding sites while exposing soldering materialfilled in multiple through-mold vias (TMVs) formed in the dielectricmolding layer. Moreover, the optical transceiver includes a second chipcomprising photonics devices embedded in a SOI wafer having a frontsurface with multiple conductor bumps being added. The second chip isstacked over the first chip with the multiple conductor bumps on thefront surface being bonded respectively to the soldering material in themultiple TMVs.

In an alternative embodiment, the present invention provides a methodfor assembling a compact optical transceiver. The method includesproviding a PCB with a plurality of prefabricated surface bonding sitesand packaging a first chip by embedding multiple electronics devices ina dielectric molding layer overlying a dielectric redistribution layer.Additionally, the method includes adding a plurality of conductor ballsto a back-end surface of the dielectric redistribution layer. Further,the method includes forming multiple through-mold vias (TMVs) in thedielectric molding layer. Each TMV is filled with a soldering material.Furthermore, the method includes disposing the first chip on the PCB bybonding the plurality of conductor balls respectively onto the pluralityof prefabricated surface bonding sites while exposing the solderingmaterial filled in the multiple TMVs. The method further includesforming a second chip comprising photonics devices embedded beneath afront surface of a SOI wafer without any through-silicon via structureand adding multiple conductor bumps on the front surface. Moreover, themethod includes flipping the second chip to bond the multiple conductorbumps respectively to the soldering material in the multiple TMVs in thedielectric molding layer of the first chip.

Many benefits are provided with the improvement according to the presentinvention. In certain embodiments, the present invention provides a 3Ddie-on-package (DoP) multichip stacking integration for packaging anoptical transceiver achieving superior compact size with substantiallylow parasitic capacitance using lower cost FOWLP and TMV technology. Thestacked architecture saves more board area, which will be for smallerform factor optical module or for on-board optics application. By fullydecoupling processes for photonics and electronics devices on separatechips, much higher yield can be achieved for each component and higherreliability for the optical transceiver as a whole. Additionally, byutilizing the TMV technology and direct conductor ball bonding viaredistribution layer and PCB, all unreliable high-parasitic wire bondsincluding LD power wires and high-cost low-yield TSV bonding inSi-photonics chip are eliminated to provide a super-low parasiticassembly process. Using TMV technology to make vertical interconnectbetween top and bottom dies or packages is flexible to variouselectronic technology nodes. This is beneficial if the opticaltransceiver designer want to change the technology of driver/TIA (SiGe,GaAs, or CMOS) and CDR or PAM4 ASIC (45 nm, 28 nm, 20 nm CMOS).Combining FOWLP and TMV process, people do not need to re-design theindividual chip and re-develop its corresponding processes of each chip.The present invention achieves these benefits and others in the contextof broadband communication technology. However, a further understandingof the nature and advantages of the present invention may be realized byreference to the latter portions of the specification and attacheddrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The following diagrams are merely examples, which should not undulylimit the scope of the claims herein. One of ordinary skill in the artwould recognize many other variations, modifications, and alternatives.It is also understood that the examples and embodiments described hereinare for illustrative purposes only and that various modifications orchanges in light thereof will be suggested to persons skilled in the artand are to be included within the spirit and purview of this process andscope of the appended claims.

FIG. 1 is a top view of an optical transceiver assembled by DoP processon a PCB according to an embodiment of the present invention.

FIG. 2 is a diagram showing cross-sectional AA′ cut view of the opticaltransceiver assembly of FIG. 1 according to the embodiment of thepresent invention.

FIG. 3 is a diagram showing cross-sectional BB′ cut view of the opticaltransceiver assembly of FIG. 1 according to the embodiment of thepresent invention.

FIG. 4 is a diagram showing cross-sectional CC′ cut view of the opticaltransceiver assembly of FIG. 1 according to the embodiment of thepresent invention.

FIGS. 5A-5D are diagrams showing a series of processes for assembling acompact optical transceiver according to an embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

The present disclosure is related to an integrated photonics device.More particularly, a high-speed compact optical transceiver is formed bya die-on-package (DoP) multichip integration of a high-yield siliconphotonics chip stacking over a FOWLP packaged electronics chip withthrough-mold vias (TMVs) for electrical coupling. In certainembodiments, the invention is applied for high speed opticalcommunication, though other applications are possible.

The following description is presented to enable one of ordinary skillin the art to make and use the invention and to incorporate it in thecontext of particular applications. Various modifications, as well as avariety of uses in different applications will be readily apparent tothose skilled in the art, and the general principles defined herein maybe applied to a wide range of embodiments. Thus, the present inventionis not intended to be limited to the embodiments presented, but is to beaccorded the widest scope consistent with the principles and novelfeatures disclosed herein.

In the following detailed description, numerous specific details are setforth in order to provide a more thorough understanding of the presentinvention. However, it will be apparent to one skilled in the art thatthe present invention may be practiced without necessarily being limitedto these specific details. In other instances, well-known structures anddevices are shown in block diagram form, rather than in detail, in orderto avoid obscuring the present invention.

The reader's attention is directed to all papers and documents which arefiled concurrently with this specification and which are open to publicinspection with this specification, and the contents of all such papersand documents are incorporated herein by reference. All the featuresdisclosed in this specification, (including any accompanying claims,abstract, and drawings) may be replaced by alternative features servingthe same, equivalent or similar purpose, unless expressly statedotherwise. Thus, unless expressly stated otherwise, each featuredisclosed is one example only of a generic series of equivalent orsimilar features.

Furthermore, any element in a claim that does not explicitly state“means for” performing a specified function, or “step for” performing aspecific function, is not to be interpreted as a “means” or “step”clause as specified in 35 U.S.C. Section 112, Paragraph 6. Inparticular, the use of “step of” or “act of” in the Claims herein is notintended to invoke the provisions of 35 U.S.C. 112, Paragraph 6.

Please note, if used, the labels left, right, front, back, top, bottom,forward, reverse, clockwise and counter clockwise have been used forconvenience purposes only and are not intended to imply any particularfixed direction. Instead, they are used to reflect relative locationsand/or directions between various portions of an object.

FIG. 1 is a top view of an optical transceiver assembled by multichipintegration including FOWLP and DoP process on a PCB according to anembodiment of the present invention. This diagram is merely an example,which should not unduly limit the scope of the claims. One of ordinaryskill in the art would recognize many variations, alternatives, andmodifications. As shown, an optical transceiver 100 is assembled bymultichip integration. A first chip is formed under a Fan-Out WaferLevel Packaging (FOWLP) architecture to integrate all criticalelectronics dies needed for an optical transceiver. A second chip isformed as a single Si-photonics (Sipho) die to integrate major photonicsparts including surface-mounted laser diode. The second chip orSi-photonics die is stacked over the first chip in a Die-on-Packageprocess to couple the corresponding electronics devices in the firstchip by employing through-mold via (TMV) technology.

Referring to FIG. 1, in the top view of the assembled opticaltransceiver 100, a molding material 110 covers multiple electronicsdevices in a package disposed on the PCB 101. The multiple electronicsdevices are either separate electronics dies including PAM4 ASIC module122, Driver module 124, Trans-impedance Amplifier module 126, ormultiple individual AC coupling capacitors 128 and other passivecomponents 127. On an exposed front-end surface of the molding material110, a Sipho die 130 is disposed by flipping its front surface to facethe exposed front-end surface of the molding material 110. As seen, oneor more laser diodes 132 are mounted on front surface of the Sipho diethat faces down in this top view. Other components of the opticaltransceiver 100 including at least a microcontroller unit (MCU) 141 anda power management unit (PMU) 142 are directly assembled on the PCB 101.Additional features of the assembly structure of the compact opticaltransceiver 100 can be found below in several cross sectional cut viewsalong lines AA′, BB′, and CC′.

FIG. 2 is a diagram showing cross-sectional AA′ cut view of the opticaltransceiver assembly of FIG. 1 according to the embodiment of thepresent invention. This diagram is merely an example, which should notunduly limit the scope of the claims. One of ordinary skill in the artwould recognize many variations, alternatives, and modifications. Asshown in this AA′ cut view, a first chip is bonded to a surface of thePCB 101 by a plurality of balls 119. The first chip, as mentionedearlier in FIG. 1, is a FOWLP package of multiple electronics dies.Particularly in this cut view, a PAM4 ASIC module 122, a Driver module124, and several AC coupling capacitors (CAP) 128 are embedded in amolding material 110. The molding material 110 is an EmbeddingInsulation Sheet (EBIS) type dielectric material commonly used for theFOWLP package process.

As seen, the molding material 110 is formed overlying another dielectricmaterial served as a redistribution layer (RDL) 113. This RDL 113includes multiple patterned or separately embedded conductive pads orwirings 115. On a back-end surface of RDL 113, a plurality of conductorballs 119 are added via a back-end process before disposing the FOWLPpackage onto corresponding a plurality of prefabricated surface bondingsites of the PCB 101. Each of the plurality of conductor balls 119 formsan electrical contact to a conductive pad inside the RDL 113 and is ledto other locations of the 2D plane of the RDL 113 for connecting todesignated electronics devices in the FOWLP package. Of course, theplurality of conductor balls 119 also connect the internal wirings ofthe PCB that lead to other electronics devices on the PCB such as MCU orPMU or other external sources for operating the optical transceiver.

Additionally shown in FIG. 2, a second chip 130 is stacked over thefirst chip. In an embodiment, the second chip 130 is formed as a Siphodie by integrating substantially all photonics devices only withoutincluding any electronics device process and any costly trans-siliconvia (TSV) structure through the fragile photonics devices. In anexample, the photonics devices in the Sipho die 130 include opticalmodulator 135, multiple photo diodes (137 in FIG. 4), and Si or SiNbased optical waveguides for beam couplers/splitters or mux/demuxdevices (not explicitly shown). In another example, several fibercoupling structures 134 or 136 are formed on the front surface of thesecond chip for either coupling laser outputs or optical fibers forinput/output optical signals of the optical transceiver.

Referring again to FIG. 2, such multichip stacking integration isachieved by utilizing a TMV technology via a Die-on-Package process.Before stacking the second chip, on the exposed front-end surface of themolding material 110 multiple through-mold via (TMV) structures areformed with straight profile through the whole thickness of the moldingmaterial 110 in multiple patterned locations to reach correspondingconductive pads in the RDL 113. A soldering material 129 is dropped into substantially fill the whole via with its tip near or slightly abovethe front-end surface of the molding material 110. Accordingly, thesecond chip 130, after a separate packaging process to form a Sipho die,is prepared by adding multiple conductor bumps 139 on its front surfacein locations that are designated to match the patterned locations ofmultiple TMVs. Now, the second chip 130 is flipped over to make thefront surface facing down the exposed front-end surface of the moldingmaterial so that the multiple conductor bumps 139 are respectivelybonded (by soldering) to soldering material in the multiple TMVs.

The bonding between the second chip and the first chip via the TMVstructure via conductor bump 139 provides a low-parasitic electricalconnection for designated opto-electrical control and signalcommunication between the electronics devices in the first chip and thephotonics devices in the second chip. For example, the modulator 135embedded in the Sipho die 130 is connected, via one of the multipleconductor bump 139 through a soldering material 129 and one or moreconductive pads and wirings in the RDL 113, to the Driver module 124 tomodulate output laser light based on designated digital signal patterns.In another example, the photo diodes 137 (see FIG. 4 below) are alsoelectrically coupled, via one of the multiple conductor bump 139 througha soldering material 129 and one or more conductive pads and wirings inthe RDL 113, to send converted current signals (from received opticalsignals) to the Trans-impedance Amplifier module 126. No wirebonds existin the whole optical transceiver package on PCB assembly. Thewirebonds-free assembly scheme makes the optical transceiver capable ofdelivering >56 Gbaud symbol rate, and thus capable of delivering 112Gbps with PAM4 signal modulation format.

In another embodiment, one or more laser diodes 132 are mounted on aprefabricated recess region 131 of the front surface where a conductivepad 133 can be disposed for receiving the laser diodes 132. Theconductive pad 133 includes an extended portion at a normal(not-recessed) region on the front surface. When adding multipleconductor bumps 139 on the front surface, at least one conductor bump isattached the extended portion of the conductive pad 133 for providing DCpower for the laser diodes 132. The recessed region 131 is formed toallow a sufficient gap between the flip-bonding Sipho die on the FOWLPpackage even with the surface mounting laser diodes being installedthere. Again, no wirebonds exist in this DoP process, even the wirebonds typically used for powering laser diodes are replaced by bumpbonds and internal wirings to reduce overall parasitic capacitance.

FIG. 3 is a diagram showing cross-sectional BB′ cut view of the opticaltransceiver assembly of FIG. 1 according to the embodiment of thepresent invention. This diagram is merely an example, which should notunduly limit the scope of the claims. One of ordinary skill in the artwould recognize many variations, alternatives, and modifications. Asshown in the particular cut view along BB′ line, an optical fiber 138 iscoupled to the corresponding fiber coupling structure 136 formed in thefront surface of the second chip 130. In this multichip stackingconfiguration, at least a section of the optical fiber 138 is cappedbetween the front surface of the second chip and the front-end surfaceof the molding material 110 of the first chip. In a specific embodiment,the fiber coupling structure 136 is formed to align optical core of theoptical fiber 138 with the optical waveguides in the Sipho die 130. Theproper alignment may be achieved by proper positioning the fibercoupling structures 136 such as V-groove at a recessed region of thefront surface when forming the Sipho die 130.

FIG. 4 is a diagram showing cross-sectional CC′ cut view of the opticaltransceiver assembly of FIG. 1 according to the embodiment of thepresent invention. This diagram is merely an example, which should notunduly limit the scope of the claims. One of ordinary skill in the artwould recognize many variations, alternatives, and modifications. Asshown in the particular cut view along CC′ line, a first chip is bondedto the PCB 101 via a plurality of balls 119. The first chip, asmentioned earlier in FIG. 1 and FIG. 2, is a FOWLP package of multipleelectronics dies. Particularly in this cut view, a PAM4 ASIC module 122,a Trans-impedance Amplifier (TIA) module 126, and several AC couplingcapacitors (CAP) 128 are embedded in a molding material 110. The secondchip, as mentioned earlier in FIG. 1, FIG. 2 and FIG. 3, is a Sipho die130 that integrates substantially all photonics devices includingembedded photo diodes 137 and surface mounted laser diodes 132 andoptical fibers 138. The bonding between the second chip and the firstchip via the TMV structure via conductor bump 139 provides alow-parasitic electrical connection for designated opto-electricalcontrol and signal communication between the electronics devices, suchas TIA 126, in the first chip and the photonics devices, such as photodiodes 137, in the second chip.

In an alternative embodiment, the present invention also provides amethod for assembling a compact optical transceiver by illustrating afew key processes based on a multichip stacking integration employinglow cost FOWLP architecture and TMV technology for facilitating a DoPprocess. FIGS. 5A-5D are diagrams showing a series of processes of themethod according to an embodiment of the present invention. Thesediagrams are merely examples, which should not unduly limit the scope ofthe claims. One of ordinary skill in the art would recognize manyvariations, alternatives, and modifications. One or more processes maybe skipped by the illustration of just four snap shots of the wholeassembly processes. One of the existing or additionally processes may beinserted in more than single sequential orders. Other processes may beincluded upon minor changes in components while not affecting the mainsequence of the assembly process.

Referring to FIG. 5A in a cross-sectional view, a FOWLP package isformed with multiple electronics devices embedded in a dielectricmolding layer 110 overlying a dielectric redistribution layer 113. Thedielectric molding layer 110 leaves a front-end surface 111 and thedielectric redistribution layer 113 has a back-end surface 112. TheFOWLP package basically integrates substantially all electronics diesincluding PAM4 or CDR, driver, and TIA for assembling an opticaltransceiver. Being incorporated as part of the FOWLP process, a TMVprocess is performed to create multiple straight profiled through-moldvias (TMVs) in multiple patterned locations. Additionally, the FOWLPprocess also includes a formation of patterned conductive pads 115 orwirings in the dielectric redistribution layer 113. These conductivepads 115 are selectively formed, using Cu material through a back-endprocess, at certain locations in the front end surface (not exposed) andalternative locations in the back-end surface 112. A 2-dimensionalnetwork of conductive wirings is also formed therein to selectivelyconnect those conductive pads based on the designated application.

In an embodiment, each TMV is created by laser process to etch or drilldown from the front-end surface 111 with high aspect ratio through thewhole thickness of the molding layer 110 to reach one of the conductivepad 115 at the front end (generally not exposed) of the dielectricredistribution layer 113. Following the formation of multiple TMVs, asoldering material 129 is dropped into each TMV following a formation ofUBM structure on the Cu pad by electroless Ni/Au plating. In certainembodiments, the soldering material is sufficiently filled each TMV suchthat a tip portion of the soldering material 129 is near or slightlyabove the front-end surface 112.

In another embodiment, the FOWLP process also includes a back-endsurface bump formation process. In particular, on the back-end surface112, a plurality of conductor balls 119 (usually made of a selectedsoldering material or alloy) is formed at predetermined locations thatare matched with a plurality of prefabricated surface bonding sites onthe PCB 101.

Referring to FIG. 5B in a cross-sectional view, a Si-photonics (Sipho)die 130 is formed separately to integrate photonics devices only. Nocritical electronics device process is done with this die. Particularly,the Sipho die 130 is made from a piece of SOI wafer in which variousoptical waveguides and optical components are formed. In an example, theoptical waveguides can be Si-based or Si₃N₄-based to provide opticalbeam coupling/splitting or wavelength mux/demux functions. Othercomponents including optoelectronic devices such as laser modulator 135and photo diodes can be also embedded beneath a front surface 130F ofthe Sipho die 130. But, no any through-Silicon via structure is includedin the Sipho die formation process to avoid easy damage to the embeddedphotonics devices or near-surface optical components in the thin SOIwafer and any associated low-yield production issue.

In a specific embodiment, the Sipho die formation process also includesforming a recessed region 131 in the front surface 130F and a conductivepad 133 can be laid out and placed over the recessed region 131including at least one extended portion with regular level of the frontsurface 130F. This recessed region 131 plus corresponding conductive pad133 provides a base for mounting one or more laser diodes 132. The laserdiodes 132 has all its corresponding electrical connections especiallythose for receiving a DC current for driving laser excitations beingestablished through the conductive pad 133.

In another specific embodiment, a follow-up process of preparing theSipho die 130 includes adding multiple conductor bumps 139 on multipleselected locations on the front surface 130F including the at least oneextended portion of conductive pad 133. Nevertheless, the multipleconductor bumps, each may be made of a selected soldering material, areconfigured to form electrical connection for the embedded lasermodulator 135 or photo diodes as well as for the surface mounted laserdiodes 132.

Referring to FIG. 5C, the optical transceiver assembly process isperformed by a multichip 3D stacking integration. The FOWLP package isdisposed on the PCB 101 with the back-end surface 112 facing the PCB sothat the plurality of conductor balls 119 is respectively bonded to theplurality of prefabricated surface bonding sites of the PCB 101. Thesebump bonds substantially establish necessary electrical connections ofthe multiple electronics devices in the FOWLP package between themselvesor between them and external devices without using any wire bonds. Thus,desired very low parasitic capacitance for the attachment of the FOWLPpackage on the PCB can be achieved for assembling a high (>56) Gbaudsymbol rate transceiver.

Additionally, the Sipho die 130 is flipped over to have the frontsurface 130F facing the front surface 112 of the molding material 110 ofthe FOWLP package. A Die-on-Package process is performed by bonding themultiple conductor bumps 139 directly onto respective tip portion ofsoldering material 129 in the multiple TMVs formed in the moldingmaterial 110. Again, the attachment of Sipho die 130 on the FOWLPpackage requires no wire bonds even for the power line of the one ormore laser diodes 132. Instead, TMV technology is employed to makevertical interconnect between top Sipho die and bottom electronics diesin FOWLP package. This provides tremendous flexibility to variouselectronic technology nodes and is beneficial for the opticaltransceiver designer to change particular technology for optimizing theperformance of modulator driver/TIA modules by selecting either SiGe,GaAs, or CMOS technology and enhancing the performance of CDR or PAM4ASIC under 45 nm, 28 nm, 20 nm CMOS technology scaling up.

Referring to FIG. 5D in an alternative cross-sectional view of theassembled optical transceiver on the PCB, after the DoP processmultichip stacking of the Sipho die 130 on the FOWLP packaged chip, oneor more optical fibers 138 are attached to one or more prefabricatedfiber coupling structures 136 on an edge of the front surface 130F ofSipho die 130. Now the locations of fiber coupling structures 136 aresomewhere between the front surface 130F and the front-end surface 111of the molding material 110. In an embodiment, the front surface 130F ofthe Sipho die 130 is properly recessed from the end region to allowspace for installing the optical fibers 138 such that the fiber core canbe properly aligned (and fixed) to the optical waveguides in the Siphodie 130. Of course, one of ordinary skill in the art shall recognizemany variations, alternatives, and modifications about the optical fiberinstallation on to the compact optical transceiver.

While the above is a full description of the specific embodiments,various modifications, alternative constructions and equivalents may beused. Therefore, the above description and illustrations should not betaken as limiting the scope of the present invention which is defined bythe appended claims.

What is claimed is:
 1. An optical transceiver by hybrid multichipintegration comprising: a printed circuit board (PCB) with a pluralityof prefabricated surface bonding sites; a first chip comprising multipleelectronics devices embedded in a dielectric molding layer overlying adielectric redistribution layer, the first chip being disposed on thePCB by bonding the dielectric redistribution layer via a plurality ofconductor balls respectively on the plurality of prefabricated surfacebonding sites while exposing soldering material filled in multiplethrough-mold vias (TMVs) formed in the dielectric molding layer and oneor more prefabricated recessed structures; a second chip comprisingphotonics devices embedded in a SOI wafer having a front surface withmultiple conductor bumps and one or more fiber coupling structures, thesecond chip being stacked over the first chip with the multipleconductor bumps on the front surface being bonded respectively to thesoldering material in the multiple TMVs; and one or more optical fibersfixed within V-grooves defined between recessed regions in the frontsurface of the second chip and the one or more prefabricated recessedstructures in the first chip aligned with the one or more fiber couplingstructures in the front surface of the second chip, such that a firstfiber coupling structure is direct physical contact with a firstconductor bump within a first V-groove.
 2. The optical transceiver ofclaim 1 wherein the first chip comprises multiple electronics diespackaged together using an Embedding Insulation Sheet (EBIS) typematerial for the dielectric molding layer under a fan-out wafer levelpackage (FOWLP) architecture overlying a HD-8940 Polybenzoxazole (PBO)film for the dielectric redistribution layer.
 3. The optical transceiverof claim 1 wherein the multiple electronics devices comprise a PAM4application-specific integrated circuit (ASIC) module, a driver module,a trans-impedance amplifier module, and multiple alternating current(AC) coupling capacitors.
 4. The optical transceiver of claim 1 whereineach of the plurality of conductor balls is bonded to a first conductivepad embedded in the dielectric redistribution layer.
 5. The opticaltransceiver of claim 4 wherein the soldering material filled in each ofthe multiple TMVs is bonded to a second conductive pad embedded in thedielectric redistribution layer.
 6. The optical transceiver of claim 1wherein the second chip is a Si-photonics chip.
 7. The opticaltransceiver of claim 6 wherein the Si-photonics chip comprises Si-basedoptical waveguides aligned to the one or more fiber coupling structures,a modulator, and multiple photo diodes.
 8. The optical transceiver ofclaim 7 wherein the dielectric redistribution layer further comprisesembedded conductive wires for selectively connecting the multipleelectronics devices to at least the modulator and the multiple photodiodes respectively through the soldering material filled in themultiple TMVs and the multiple conductor bumps on the front surface ofthe second chip.
 9. The optical transceiver of claim 8 furthercomprising one or more optical fibers being installed in the one or morefiber coupling structures between the front surface of the second chipand the dielectric molding layer of the first chip to couple withcorresponding Si-based optical waveguides.
 10. The optical transceiverof claim 6 wherein the second chip further comprises one or more laserdiodes mounted on a recessed region of the front surface andelectrically coupled via a mounting pad with at one or more of multipleconductor bumps through one or more conductive pads in the dielectricredistribution layer and one or more of the plurality of conductor ballsto connect to the PCB without any external wire bonds.